Planning Lead Wires and Connection Points for a Wafer Heater
https://flexible-thermal-guide.yousher.com/kapton-heater-applications-in-electronics-and-precision-equipment
In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result