Maintenance Planning for Equipment Built Around a Wafer Heater

https://electric-heat-insights.westhavenscope.com/posts/common-design-challenges-when-using-an-ito-glass-heater

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result