How Cutouts, Edges, and Openings Affect a Semiconductor Heater Layout

https://advanced-heating-guide.halcyonledger.com/posts/how-to-choose-heater-materials-for-semiconductor-processing-equipment

In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery